ORMOCER
http://www.ormocer.de:80/EN/mikrosystemtechnik/optische_anwendungen/index.jsp
ORMOCER®s for
optical
applications

REM-Bild eines ORMOCER®-Strahlteilers, Herstellverfahren: Prägen (Design und Prägung: Fraunhofer IOF Jena)


Contact:

Dr. Michael Popall
Phone +49 931 4100-522
Fax +49 931 4100-559
michael.popall@
isc.fraunhofer.de
Fraunhofer-Institut für Silicatforschung ISC
Neunerplatz 2
97082 Würzburg
The available structuring methods, excellent adhesion to different materials and controllable optical properties make ORMOCER®s ideal coatings for the production of optical microsystems.

Their compatibility with traditional thin-film technology, simple means of processing (curing temperatures < 170 °C in standard atmosphere) and the possibility of creating microstructures (e.g. bumps or vias) are a guarantee for maximum flexibility and versatility, which is underlined by the fact that ORMOCER®s feature negative resist behavior.

Methods for creating microstructures:

  • Standard photolithography process
  • Laser ablation
  • Laser direct writing
  • (Precision-) Stamping 

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ORMOCER