Dr. Michael Popall Phone +49 931 4100-522 Fax +49 931 4100-559 michael.popall@ isc.fraunhofer.de
Fraunhofer-Institut für Silicatforschung ISC Neunerplatz 2 97082 Würzburg
The available structuring methods, excellent adhesion to different materials and controllable optical properties make ORMOCER®s ideal coatings for the production of optical microsystems.
Their compatibility with traditional thin-film technology, simple means of processing (curing temperatures < 170 °C in standard atmosphere) and the possibility of creating microstructures (e.g. bumps or vias) are a guarantee for maximum flexibility and versatility, which is underlined by the fact that ORMOCER®s feature negative resist behavior.
